DIFF Subgroup
C30B 23/08 by condensing ionised vapours (by reactive sputtering C30B25/06)
Introduced: January 1980
Title
Titles differ between systems:
IPC: by condensing ionised vapours
CPC: by condensing ionised vapours (by reactive sputtering C30B25/06)
Full Title
Full titles differ between systems:
IPC:
Single-crystal growth by condensing evaporated or sublimed materials > Epitaxial-layer growth > by condensing ionised vapours
CPC:
Single-crystal growth by condensing evaporated or sublimed materials > Epitaxial-layer growth > by condensing ionised vapours (by reactive sputtering C30B25/06)
No child classifications to compare. This is a leaf node in both IPC and CPC.