DIFF Subgroup
C30B 23/06 Heating of the deposition chamber, the substrate or the materials to be evaporated
Introduced: January 1980
Title
Titles differ between systems:
IPC: Heating of the deposition chamber, the substrate, or the materials to be evaporated
CPC: Heating of the deposition chamber, the substrate or the materials to be evaporated
Full Title
Full titles differ between systems:
IPC:
Single-crystal growth by condensing evaporated or sublimed materials > Epitaxial-layer growth > Heating of the deposition chamber, the substrate, or the materials to be evaporated
CPC:
Single-crystal growth by condensing evaporated or sublimed materials > Epitaxial-layer growth > Heating of the deposition chamber, the substrate or the materials to be evaporated
Of 2 combined children, 0 exist in both systems.
2 codes are CPC-only extensions.
Child Classifications
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