DIFF Subgroup
C30B 31/14 Substrate holders or susceptors
Introduced: January 1980
Full Title
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > by contacting with diffusion material in the gaseous state > Substrate holders or susceptors
No child classifications to compare. This is a leaf node in both IPC and CPC.