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PCE
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DIFF Subgroup
G03F 1/22

Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof

Introduced: January 2012

Title

Titles differ between systems:

IPC: Masks or mask blanks for imaging by radiation of 100 nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof

CPC: Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof

Full Title

Full titles differ between systems:

IPC:

Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Masks or mask blanks for imaging by radiation of 100 nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof

CPC:

Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof

IPC and CPC are identically structured here. All 1 subcodes exist in both systems.

IPC defines codes here since 2012.

Child Classifications

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  • G03F 1/24 Reflection masks; Preparation thereof since 2012 IPC+CPC Available in IPC and CPC

Top Applicants

Top Applicants (IPC)

Class G03,2013–2023, worldwide · Source: EPO PATSTAT

  1. CANON 31,416
  2. CANON JP 17,469
  3. KYOCERA DOCUMENT SOLUTIONS 9,845
  4. RICOH COMPANY 9,807
  5. ASML NETHERLANDS NL 9,427
  6. FUJIFILM JP 7,225
  7. KONICA MINOLTA CORPORATION 7,216
  8. FUJI XEROX COMPANY 5,711
  9. CARL ZEISS SMT DE 4,971
  10. RICOH COMPANY JP 4,123

Top Applicants (CPC)

Class G03,2013–2023, worldwide · Source: EPO PATSTAT

  1. CANON JP 19,215
  2. CANON 12,916
  3. ASML NETHERLANDS NL 10,000
  4. FUJIFILM JP 7,814
  5. SAMSUNG ELECTRONICS COMPANY KR 5,181
  6. CARL ZEISS SMT DE 5,079
  7. RICOH COMPANY JP 4,343
  8. LG INNOTEK COMPANY KR 4,054
  9. KYOCERA DOCUMENT SOLUTIONS 3,812
  10. KYOCERA DOCUMENT SOLUTIONS JP 3,682