G03F 1/58 having two or more different absorber layers, e.g. stacked multilayer absorbers
Introduced: January 2012
Full Title
Full titles differ between systems:
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Absorbers, e.g. opaque materials > having two or more different absorber layers, e.g. stacked multilayer absorbers
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Absorbers, e.g. of opaque materials > having two or more different absorber layers, e.g. stacked multilayer absorbers
No child classifications to compare. This is a leaf node in both IPC and CPC.