IPC Subgroup
G03F 1/58 having two or more different absorber layers, e.g. stacked multilayer absorbers
Introduced: January 2012
Full Title
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Absorbers, e.g. opaque materials > having two or more different absorber layers, e.g. stacked multilayer absorbers
Classification Context
- Section:
- PHYSICS
- Class:
- PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- Subclass:
- PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR