Inspecting

Introduced: January 2012

Full Title

Full titles differ between systems:

IPC:

Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Preparation processes not covered by groups > Auxiliary processes, e.g. cleaning > Inspecting

CPC:

Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Preparation processes not covered by groups G03F1/20 - G03F1/50 > Auxiliary processes, e.g. cleaning or inspecting > Inspecting

IPC and CPC are identically structured here. All 1 subcodes exist in both systems.

IPC defines codes here since 2012.

Child Classifications

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G03F 1/86 by charged particle beam [CPB] since 2012 IPC+CPC Available in IPC and CPC