G03F 1/82 Auxiliary processes, e.g. cleaning or inspecting
Introduced: January 2012
Title
Titles differ between systems:
IPC: Auxiliary processes, e.g. cleaning
CPC: Auxiliary processes, e.g. cleaning or inspecting
Full Title
Full titles differ between systems:
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Preparation processes not covered by groups > Auxiliary processes, e.g. cleaning
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Preparation processes not covered by groups G03F1/20 - G03F1/50 > Auxiliary processes, e.g. cleaning or inspecting
IPC and CPC are identically structured here. All 1 subcodes exist in both systems.
IPC defines codes here since 2012.
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