DIFF Subgroup
H10P 72/78 using vacuum or suction, e.g. Bernoulli chucks
Introduced: January 2026
Full Title
Handling or holding of wafers, substrates or devices during manufacture or treatment thereof > for supporting or gripping > using vacuum or suction, e.g. Bernoulli chucks
No child classifications to compare. This is a leaf node in both IPC and CPC.