Heating of the deposition chamber, the substrate, or the materials to be evaporated

Full Title

Single-crystal growth by condensing evaporated or sublimed materials > Epitaxial-layer growth > Heating of the deposition chamber, the substrate, or the materials to be evaporated

Classification Context

Section:

CHEMISTRY; METALLURGY

Class:

CRYSTAL GROWTH

Subclass:

SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR