IPC Subgroup
C30B 25/02 Epitaxial-layer growth
Introduced: January 1980
Last revised: January 2006
Full Title
Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth > Epitaxial-layer growth
Classification Context
- Section:
- CHEMISTRY; METALLURGY
- Class:
- CRYSTAL GROWTH
- Subclass:
- SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
9 direct subcodes
Child Classifications
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- C30B 25/04 Pattern deposit, e.g. by using masks
- C30B 25/06 by reactive sputtering
- C30B 25/08 Reaction chambers; Selection of materials therefor
- C30B 25/1 Heating of the reaction chamber or the substrate
- C30B 25/12 Substrate holders or susceptors
- C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
- C30B 25/16 Controlling or regulating
- C30B 25/18 characterised by the substrate
- C30B 25/22 Sandwich processes