Measuring secondary ion emission, e.g. secondary ion mass spectrometry [SIMS]

Full Title

Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups , or > by measuring secondary emission from the material > using electron or ion microprobes > using incident ion beams, e.g. proton beams > Measuring secondary ion emission, e.g. secondary ion mass spectrometry [SIMS]

Classification Context

Section:

PHYSICS

Class:

MEASURING; TESTING

Subclass:

INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES