IPC Subgroup
G01Q 20/02 by optical means
Introduced: January 2010
Full Title
Monitoring the movement or position of the probe > by optical means
Classification Context
- Section:
- PHYSICS
- Class:
- MEASURING; TESTING
- Subclass:
- SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]