IPC Subgroup
G01Q 30/16 Vacuum environment
Introduced: January 2010
Full Title
Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices > Means for establishing or regulating a desired environmental condition within a sample chamber > Vacuum environment
Classification Context
- Section:
- PHYSICS
- Class:
- MEASURING; TESTING
- Subclass:
- SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]