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IPC Subgroup
G01Q 40/02

Calibration standards or methods of fabrication thereof

Introduced: January 2010

Full Title

Calibration, e.g. of probes > Calibration standards or methods of fabrication thereof

Classification Context

Section:
PHYSICS
Class:
MEASURING; TESTING
Subclass:
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]