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IPC Subgroup
G01Q 70/06

Probe tip arrays

Introduced: January 2010

Full Title

General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group > Probe tip arrays

Classification Context

Section:
PHYSICS
Class:
MEASURING; TESTING
Subclass:
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]