hybrid, i.e. charged particles and light, X-rays, plasma

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Lithography > using particular beams or near-field effects, e.g. STM-like techniques > hybrid, i.e. charged particles and light, X-rays, plasma