CPC Subgroup Additional Only
H01J 2237/31759 using near-field effects, e.g. STM
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Lithography > using particular beams or near-field effects, e.g. STM-like techniques > using near-field effects, e.g. STM