Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof

Full Title

Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof

Child Classifications

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• G03F 1/40 Electrostatic discharge [ESD] related features, e.g. antistatic coatings or a conductive metal layer around the periphery of the mask substrate
• G03F 1/42 Alignment or registration features, e.g. alignment marks on the mask substrates
• G03F 1/44 Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales
• G03F 1/46 Antireflective coatings
• G03F 1/48 Protective coatings